一种以多晶硅为振动膜的MEMS传声器研制_电子资料文库 关键词:微气体传感器;稳定性;SnO ;特征参数 [gap=755]Key words:micro gas sensor;stability;SnO2;feature parameter
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The application of finite element method (FEM) in the design of a membrane-type micro gas sensor is reported.
本文报道有限元方法在膜片型微结构气敏传感器设计中的应用。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The results show that YAG laser micro machining of Al 2O 3 plates used for the manufacture of the gas sensor arrays is easily controllable, flexible, convenient and cheap.
研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的制作方法。
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